DIAMONDLIKE CARBON DEPOSITION USING MIC

Diamond-like carbon deposition using mic

Diamond-like carbon deposition using mic 全部作者： Silie Fu Wei Li Maoping Zhang Lei Shi Chunlin Yang 赖秀琼陈俊芳 1 第作者单位： 华南师范大学 论文摘要： The spatial plasma density distribution in the reaction chamber of the quartz tube microwave plasma apparatus is diagnosed at p= 1.20 kpa, Pw =440W by a Langmuir probe, obtaining the biggest plasma density 1.05×1012/cm3. Also, the plasma density under different discharge gas pressure and power is diagnosed. Diamond-like carbon films are achieved at p= 6.8kPa, Pw =680W with CH4 flow rate being 6ml/min and H2 flow rate being 200ml/min and detected by AFM, Raman spectroscopy instrument and profiler. 关键词： Langmuir probe; Diamond-like carbon thin films () 浏览全文 发表日期： 20061107 年月日 同行评议： （暂时没有） 综合评价：