双极型晶体管工艺流程简介

The Brief Pro__ss of the Bipolar Junction Transistor双极型晶体管工艺流程简介

The Brief Pro__ss of the Bipolar Junction Transistor 双极型晶体管工艺流程简介 Wafer start The first time oxidation The SiN deposition 34 Super-sonic cleaner to clean the wafer Oxide/diffusion furna__ to grow oxidation layer and diffuse the impurities PECVD to deposit SiN thin films 34