gppAAARoll-to-Roll磁控溅射镀膜系统设计论文

Roll-to-Roll磁控溅射镀膜系统设计论文----------------------------------------------------------------------------

Roll-to-Roll磁控溅射镀膜系统设计论文 -------------------------------------------------------------- ---------------------------------- Roll-to-Roll磁控溅射镀膜系统设计论文 Roll-to-Roll磁控溅射系统设计 目录 中文摘要..............................................................3 英文摘要..............................................................4 1绪论................................................................5 1(1真空卷绕镀膜技术及设备的现状与发展..............................5 1.1.1真空卷绕镀膜技术的应用领域...................................5 2磁控溅射原理及溅射沉积工艺参数.......................................5 2.1磁控溅射原理与磁控溅射物理过程..................................5 2.2磁控溅射的工艺参数...............................................6 2.2.1磁控溅射的功率...............................................6 2.2.2磁场强度.....................................................7 2.2.3溅射气压.....................................................7 2.2.4基片的温度...................................................7 3ROLL-TO-ROLL磁控溅射镀膜系统........................................8 3.1ROLL-TO-ROLL磁控溅射镀膜系统的主要组成和工作过 程..................8 3.1.1Roll-to-Roll磁控溅射系统的组要组成..........................8 3.2平面磁控溅射靶的类型选择.........................................8