不同波长的纳秒脉冲激光对多晶硅损伤特性研究

不同波长的纳秒脉冲激光对多晶硅损伤特性研究Title: Research on Damage Characteristics of Polycrystalline Silicon by Nanosec

不同波长的纳秒脉冲激光对多晶硅损伤特性研究 Title: Research on Damage Characteristics of Polycrystalline Silicon by Nanosecond Pulse Lasers with Different Wavelengths Abstract: The study aims to investigate the damage characteristics of polycrystalline silicon when irradiated by nanosecond pulse lasers with different wavelengths. Polycrystalline silicon, due to its widespread applications in various fields, requires acomprehensive understanding of its damage responses to laser irradiation for precise control and optimization of laser processing techniques. Introduction: Polycrystalline silicon exhibits unique optical, electronic, and mechanical properties, which make it an attractive material for awide range of applications, including solar cells, microelectronics, and microelectromechanical systems (MEMS) fabrication. With the increasing demand for high-precision laser processing, it is necessary to investigate the damage effects of different wavelength nanosecond pulse lasers on polycrystalline silicon to optimize laser processing parameters. Methodology: The experimental setup consists of apulsed laser system capable of emitting laser pulses with different wavelengths, such as near-infrared (1064 nm), green (532 nm), and ultraviolet (355 nm). The laser energy and pulse duration are kept constant for each wavelength. Apolycrystalline silicon sample is irradiated with laser beams of varying intensities to study its damage characteristics. Results and Discussion: The damage threshold of polycrystalline silicon is observed to vary with different wavelengths of nanosecond pulse lasers. The energy density required to induce damage decreases as the laser wavelength decreases. This phenomenon can be attributed to the absorption characteristics of polycrystalline silicon in different wavelength ranges. At longer wavelengths, polycrystalline silicon exhibits lower absorption coefficients, whereas at shorter wavelengths, it demonstrates higher absorption coefficients. This difference in absorption leads to varying damage thresholds.